Surface acoustic wave resonators with trenches and high aspect ratio structures for gas sensing applications

Abstract

The thesis mainly focuses on the investigation of the structural changes in conventional SAW one-port resonator for sensing application leading to higher sensitivity. Two structural changes are proposed, i) introducing trenches between the IDT fingers and ii) adding high aspect ratio structures. Finite element (FE) analysis of the proposed devices shows that the resonance frequency of the devices decreases with increase in trench depth or height of HAR structure. The maximum change in frequency