Design Simulation and Fabrication of High Sensitivity Multi_Directional Inertial Sensor

Abstract

In the past few decades, there has been a large market for Microelectromechanical systems (MEMS) based inertial sensors to measure the high g acceleration forces in various applications like crash tests, impacts, missiles, and artillery launches. An inertial sensor consists of an accelerometer and gyroscope, which measure the position, orientation, and trajectory. However, using MEMS-based high g inertial sensors results low capacitive sensitivity, which does not measure the low value of momentum as using other technologies like solid state accelerometers or optical gyroscopes. Implementation of high sensitivity MEMS based inertial sensors has gained importance in recent years due to its optimized size, low cost, and high capacitive sensitivity. newlineThis thesis deals with the design and fabrication of high sensitivity-based MEMS Inertial sensor which consist of multidirectional accelerometer and one directional gyroscope. The proposed sensors are simulated using COMSOL Multiphysics and CoventorWare software with finite element modelling (FEM) and fabrication was done with the SOIMUMPS process. newlineIn this thesis four steps were involved to implementation of a MEMS-based inertial sensor. The first step was to design and simulate the MEMS suspension beam structure for proof mass, which measures multidirectional displacement. The proposed suspension beam structures are simulated using the COMSOL Multiphysics software, Stress and displacement analysis are performed with the help of solid mechanic physics.The second step is on mathematical modelling on proposed inertial sensor. The parameters of beam constant, maximum liner displacement, angular displacement, capacitive sensitivity, and eigen frequency were calculated with 30g of acceleration force. newline