Novel Laser Micromachined Optofluidic Sensors

Abstract

Optofluidics is a micro-fabrication-based technology that explores novel functions newlineand related physics through the synergy between light and fluids at the microscale. newlineOne of the main advantages of this field is the replacement of bulk optics with newlineintegrated optics on a chip, which consequently makes the device both time and newlinecost-effective. The field is doubly interdisciplinary as it offers potential applications newlinein the fields of chemical sensing, physical characterization, and biomedical research. newline newlineThere are several microfabrication technologies adopted to realize optofluidic de- newlinevices. Lithographic techniques are extensively used for mass production, but the newlinecost of the reagents involved in the fabrication of the master mold is too high and newlinethis limits its potential for design optimization. However, maskless direct writing newlinetechniques like femtosecond laser micromachining (FLM) and CO2 laser cutting newlineand engraving technology have an advantage due to their lower fabrication costs newlineand shorter turn-around times (TAT) for chip fabrication. FLM in particular offers newlineadded advantages like the capability to produce both optical waveguides and mi- newlinecrofluidic channels, the capability to produce 3-dimensional structures, possibility newlineto combine different fabrication techniques, and the rapid-prototyping capability. newline newlineLab-on-a-chip devices are socially relevant in multiple ways. In the medical diagnos- newlinetics sector, these devices have been used for on-chip sample processing and analysis newlinefor point-of-care diagnostics. In environmental research, they have been utilized newlinefor desalination, water sanitation, and fluoride detection