Nanofinishing and surface integrity enhancement of inertial sensor microstructures using medium pressure plasma process

Abstract

Surface integrity influences several functional parameters such as friction wear and tear ability of distributing and holding lubricant thin film coating etc It is not uncommon that aerospace inertial sensor technology demands 732 zero 8482 surface and subsurface defects up to atomic level on sensing element microstructures These microstructures are mostly nonmetallic brittle materials such as glass fused silica silica etc and are machined and polished such that the surface integrity is ma...